Аннотация
Photoelectrochemically nanostructured GaN epilayers were found to exhibit good sensitivity towards CO in the temperature range from 180 to 280°C. We show that subjection of nanostructured GaN samples to 166 MeV Xe+23 ion irradiation causes considerable reduction of the gas sensitivity, while post-irradiation rapid thermal annealing results in sensitivity restoration, the effect being dependent upon the dose of irradiation and annealing temperature. A 50 % restoration of the relative sensitivity is demonstrated after rapid thermal annealing for 1 min at 800°C in samples irradiated by Xe+23 ions at a dose of 1012 cm-2.