Abstract
UDC 537.539
DOI https://doi.org/10.52577/eom.2026.62.2.56
This paper presents the results of computer simulations of scattered Ar⁺ ions from a stepped InP(001)<ī10> surface at different incidence angles using the binary collision approximation method. The dependence of the energy of scattered ions on their scattering angle was obtained, and it is shown that at small incidence angles, scattering occurs from the ideal part of the surface. An increase in the incidence angle leads to ion scattering from the atomic step modeled on the surface. The obtained results demonstrate that, during scattering from the stepped surface, oval- shaped features appear in the E(θ) dependence of scattered ions, corresponding to multiple scattering at the same scattering angle. Energy spectra were also obtained, confirming that with increasing the incidence angle of ions, peaks appear corresponding to specularly scattered ions, ions scattered from the edge atom, and dechanneled ions.
Keywords: ion scattering, dechanneling, computer simulation, defect.