Abstract
UDC 621.793.1
The composition, texture, residual stresses, and microhardness of the vacuum arc carbonitridetitanium coatings deposited from the separated plasma flows have been investigated. Their dependence of the technological deposition parameters and the reactive gas components ratio has been specified.
Keywords: vacuum arc deposition, carbonitridetitanium coatings, separation, texture, microhardness, residual stresses.