ЭНЕРГЕТИЧЕСКОЕ РАСПРЕДЕЛЕНИЕ ИОНОВ В ПРИКАТОДНЫХ ОБЛАСТЯХ ТЛЕЮЩЕГО РАЗРЯДА В СМЕСИ O2+Ar

Аннотация

The results of investigation of ion energy distribution in cathode region of direct current dis- charge in O2+Ar (0–100%) mixture are presented at different plasma parameters (1-3 Pa pressure, 10–30 mA discharge current). It is shown that Ar percentage more than 20% results to ion of Ar2+ formation and shifting distribution maximum to higher energies.

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