ФИЗИЧЕСКИЕ ПАРАМЕТРЫ ПЛАЗМЫ В ОПТИМАЛЬНЫХ УСЛОВИЯХ МЕТАЛЛИЗАЦИИ ПОЛИМЕРНЫХ МАТЕРИАЛОВ

Аннотация

The process for the polymer materials metallization using the magnetron sputtering system has been investigated. Both electron density and mean energy were determined in the near-to-substrate region. It was show that pre-treatment in the oxygen-containing plasmas as well as the adjustment of the magnetron plasma physical parameters provide the optimization of polymer materials metallization process.

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