ИССЛЕДОВАНИЕ МЕХАНИЗМА ОБРАЗОВАНИЯ И СКОРОСТИ ИЗМЕНЕНИЯ НЕРАВНОВЕСНЫХ ТОЧЕЧНЫХ ДЕФЕКТОВ В ПРОЦЕССЕ ОКИСЛЕНИЯ КРЕМНИЯ

Аннотация

In the work mentioned, that density of surface charges can be increased with difference of contact potentials (DCP). Proved, that starting from depth of about 0,4 micrometers increase in anode oxidation speed is observed. Possibility determination of distribution profile of monolegirrated mixtures through the semiconductors depth is proved.

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