КЛАССИФИКАЦИЯ СВЧ ПЛАЗМОТРОНОВ ДЛЯ ПРОИЗВОДСТВА ИЗДЕЛИЙ ЭЛЕКТРОННОЙ ТЕХНИКИ

Аннотация

Classification of microwave plasmatrons used in the processes of electronic technique devices pro- duction is presented. It based on constructive peculiarities and technical features of microwave applicators. The proposed classification of microwave plasmatrons will be useful while projecting and chosing the type of mi- crowave plasma source for certain technical purpose and also for studying and examination well–known con- structions of that type plasma generators.

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