Rezumat
CZU 621.9.048
https://doi.org/10.52577/eom.2024.60.2.19
In order to increase the service life of critical products made of refractory metals, the most effective is the use of protective coatings based on oxidation-resistant ceramic materials. Using an electrode/target made of heterophase HfSi2–MoSi2–HfB2 ceramics by electrospark deposition (ESD), high-power impulse magnetron sputtering (HIPIMS) technologies, as well as the combined ESD+HIPIMS technology, coatings were deposited onto molybdenum substrate (MCh-1 brand). Electrode materials and coatings were studied by the X-ray diffraction, the glow discharge optical emission spectroscopy, the X-ray spectral microanalysis, and the scanning electron microscopy. Combined ESD+HIPIMS technology made it possible to create a hard layer of oxidation-resistant ceramics on the surface of the substrate, which does not produce through cracks inherent in ESD coatings.
Keywords: electrospark deposition, high-power impulse magnetron sputtering, oxidation-resistant ceramics, molybdenum substrate, two-layer coating, mechanical and tribological properties.