The Influence of Aluminium Foil Surface Morphology on the Probability of Heterogeneous Recombination of О(<sup>3</sup>Р) Atoms in Oxygen Plasma

Rezumat

UDC 537.525 + 539.19

 

The process of recombination of oxygen atoms on the surface of the aluminum foil and thin film was investiga-ted in the positive column of the DC glow discharge in oxygen at a gas pressure of 200 Pa, a discharge current of 50 mA, and surface temperatures of 350–530 К. It was shown that an increase in the average surface roughness leads to a decrease of the O(3P) atoms heterogeneous recombination probability. Apparent activation energies for the heterogenic recombination process of oxygen atoms on the aluminum foil surface were calculated.

 

Keywords: heterogeneous recombination, oxygen, surface, film, foil, aluminum.

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