Rezumat
Electrochemical micromachining (ECMM) of photoresist-patterned mild steel has been carried out in 1M NaCl pH = 1,0. It is shown that pulse anodic-cathodic micromachining (etching) results in significant increasing of the Etch Factor: EF ~ 3,0 at direct current and EF ~ 6,0 at anodic-cathodic micromachining. New combined method of machining (anodic-cathodic machining + direct current) has been applied. Due to this method it is possible to increase localization of dissolution (EF) at maintaining high rate of process.
Metrici
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