КИНЕТИЧЕСКИЕ ЗАКОНОМЕРНОСТИ ПРОЦЕССА ГЕТЕРОГЕННОЙ РЕКОМБИНАЦИИ АТОМОВ O(3P) В ПЛАЗМЕ O2-Ar

Rezumat

The probabilities of heterogeneous recombination of oxygen atoms have been determined for condi- tions of positive column glow discharges of O2-Ar (0-90%) mixtures at wide range of temperature of reactor wall. The apparent activation energies of heterogeneous recombination process are calculated.

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