Influence of Pressure on Recombination of O(<sup>3</sup>P) Atoms on Aluminum Surface in Oxygen Plasma

Abstract

UDC 537.525 + 539.19

 

The electron paramagnetic resonance method is used for investigations of the loss processes oxygen atoms on the aluminum surface in the positive column of a dc glow discharge in oxygen at gas pressures of 50–400 Pa and discharge currents of 5–100 mA. The morphology of the aluminum surface is investigated.

 

Keywords: heterogeneous recombination, atom, oxygen, surface, aluminum.

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