ИССЛЕДОВАНИЕ ХАРАКТЕРИСТИК МАГНЕТРОННЫХ РАСПЫЛИТЕЛЬНЫХ СИСТЕМ НЕСБАЛАНСИРОВАННОГО ТИПА

Abstract

The results of comparative analysis of four configurations of planar magnetron sputtering systems characteristics are introduced. The studies of features of constructing of magnet systems of a magnetrons unbalanced type are carried out. The regularities of influencing of discharge characteristics on parameters of energetic particles fluxes on a substrate are established.

article_13 (Русский)