РАСЧЕТ ПРОБЕГОВ ИОНОВ ПЕРЕХОДНЫХ ЭЛЕМЕНТОВ В КАРБИДЕ КРЕМНИЯ

Abstract

In the present paper we obtained approximated expressions for calculation of elastic losses of energy for low–energy heavy ions in solids by using the Thomas–Fermi–Firsov potential. It was revealed that the elastic losses of energy for low– energy ions are not constant. With rising energy E of ion the elastic energy losses increase, and at certain energy they reach maximal value. At further rise of E the elastic energy losses of ion decrease slowly. The elastic energy losses of ions Mn+ and Co+ were calculated for SiC. The ranges of heavy ions (Mn+ and Co+) in SiC were calculated in the energy range 10÷200 keV. It was shown that at low energies (E ≤ 20 keV) the ranges of ions exceed on 30−40% those determined by the LSS (Linhard–Scharff– Schiott) theory. With rising energy of ion the discrepancy decreases to 3−7%.

article_12 (Русский)