ВЗАИМОДЕЙСТВИЕ ВОДОРОДНОЙ ПЛАЗМЫ С ПОВЕРХНОСТЬЮ РАЗЛИЧНЫХ МАТЕРИАЛОВ

Abstract

The technique of definition of hydrogen atom H (2S) loss probability on a surface of various materials by a radiation spectroscopy method is offered. The results for atom loss probability in a plasma zone (d.c. glow discharge, pressure 270 Pa) for a number of materials used in electronic industry are received.

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