АНАЛИЗ ИОНИЗАЦИОННЫХ ПРОЦЕССОВ В ЭЛЕКТРОРАЗРЯДНЫХ ДАТЧИКАХ СВЕРХНИЗКОГО ДАВЛЕНИЯ

Abstract

The analysis of plasma-chemical reaction in nitrogen-oxygen plasma of super low pressure (p<10-7 Pa) in electric and magnetic field is given. The method for calculation of volt-ampere characteristics (VAC) is proposed. It is shown the VAC data the gas pressure can be determined.

article_9 (Русский)

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