АНАЛИЗ ИОНИЗАЦИОННЫХ ПРОЦЕССОВ В ЭЛЕКТРОРАЗРЯДНЫХ ДАТЧИКАХ НИЗКОГО ДАВЛЕНИЯ

Abstract

The analysis of plasma-chemical reaction in nitrogen-oxygen plasma of low pressure (p > 1 Pa) in electric field is given. The basic system of equation is proposed. It is shown on the VAC data the gas pres- sure can be determined.

article_11 (Русский)

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