Abstract
Electrochemical micromachining can remove electrically conductive materials with the transferring of ions, so that high precision is achievable. A novel method for fabricating high-aspect-ratio microstructures by electrochemical micromachining using vibratile tungsten wire was proposed in this paper. The slight vi- bration of tungsten wire can improve the machining stability. The relations between the machining accuracy and machining parameters were experimentally studied. Micro groove with the width of 15μm was ma- chined, and micro sharp-angles structure with aspect ratio of 10 was obtained experimentally.