Аннотация
In this work mentioned about the properties of the overthin layer of the SiO2. Showed that the chargeable condition at the boundary between Si and SiO2 depends on conditions of the oxidation.
In this work mentioned about the properties of the overthin layer of the SiO2. Showed that the chargeable condition at the boundary between Si and SiO2 depends on conditions of the oxidation.